Semiconductor / Microelectronics / Chemical Companies

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Contamination Control and Particle Counting for Semiconductor / Microelectronics / Chemical Companies

By increasing measurement sensitivity and precision, EMS Particle Solutions are able to help you anticipate and overcome production monitoring challenges and protect against potential yield loss.

EMS can provide both the expertise and the required particle counting sensitivity for your process, using high-performance laser particle counters for essential continuous or batch monitoring.

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Ultra Pure Water

Ultra DI-20 Water Particle Counter
Sensitivity range: 20 - 100 nm

Designed for ultrapure water systems, its low zero count, large sample volume and high counting efficiency provides unsurpassed particle detection at 20 nm sensitivity.

Ultra DI® 50 Liquid Particle Counter
Sensitivity range: 0.05 - 0.2 μm

Designed for ultrapure (DI) water systems, its low zero count, large sample volume and high counting efficiency provide unsurpassed performance at 50 nm sensitivity.

HSLIS-M50e Liquid Particle Counter
Sensitivity range: 0.05 - 0.2 μm

Provides continuous, real-time monitoring of contamination levels in deionized (DI) water.

HSLIS-M100e Liquid Particle Counter
Sensitivity range: 0.1 - 1.0 μm

Provides continuous, real-time monitoring of contamination levels in medium grade deionized water systems.

LiQuilaz® II S Series Liquid Particle Counter
S02: 0.2 - 2.0 μm, S03: 0.3 - 3.0 μm, S05: 0.5- 20.0 μm

Volumetric monitors with a variety of sizing sensitivities as low as 0.2 μm.

LiQuilaz® II E Series Liquid Particle Counter
Sensitivity range: 1.5 - 125 μm

Volumetric monitors with sizing sensitivities from 1.5 – 125 μm.

Chemicals

Online Chemical Particle Counters

Chem 20™ Chemical Particle Counter
Sensitivity range: 20 - 100 nm

The Chem 20™ is the first 20 nm chemical particle counter that detects larger concentrations of particles with better statistics than competitive products.

SLS-20 Syringe Liquid Sampler
Sensitivity range: 40 nm to 150 μm

The SLS-20 Syringe Liquid Sampler enables Chem 20TM or Chem 20TM-HI particle counters to operate in batch sampling applications. It is ideal for precise, small-volume sampling.

UltraChem® 40 Liquid Particle Counter
Sensitivity range: 40 - 125 nm

The UltraChem® 40 provides reliable contamination monitoring with the ability to detect 40 nm particles in chemicals with high molecular scatter.

HSLIS-M65e
Sensitivity range: 0.065 - 0.2 μm

The HSLIS-M65e provides continuous, real-time monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF).

UltraChem®100 Liquid Particle Counter
Sensitivity range: 100 - 500 nm

The UltraChem® 100 provides reliable contamination monitoring with the ability to detect as small as 100 nm in chemicals with high molecular scatters

LiQuilaz® II S Series Liquid Particle
Counter
S02: 0.2 - 2.0 μm, S03: 0.3 - 3.0 μm, S05: 0.5 - 20.0 μm

The LiQuilaz® II S Series provides volumetric monitors with a variety of sizing sensitivities as low as 0.2 μm.

Compression Sampler

CLS-700 T Corrosives Particle Counter

The CLS-700 T is a compression sampler combined with a LiQuilaz® II particle counter for effective measurement of particles in fluids contained in unpressurized vessels. It is ideally suited for testing chemicals containing dissolved gas.

Syringe Vacuum Samplers

Syringe Liquid Particle Sampler
Sensitivity range: 40 nm to 150 μm

The Syringe Liquid Particle Sampler uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container directly to the particle sensor.

Gases

Lasair III 110 + HPD III High Pressure Diffuser
Sensitivity range: 0.1 - 5.0 μm

  • Reduced capital cost compared to continuous fixed monitoring
  • Deploys to any location needed for further analysis
  • Identifies and isolates particle contributing lines and components
  •  Lower gas consumption than continuous fixed monitoring

HPGP-101-C High Pressure Gas Probe
Sensitivity range: 0.1 - 5.0 μm

  • Continuous sampling – no missedevents
  •  Samples and detects at line pressure
  •  Monitors either reactive or inertgases
  • Data constantly supplied to facility or data management software

Lasair® III 310B, 310C, 350L, 5100
Sensitivity range: 0.3 – 25.0 μm

  • Flow rates: 100 LPM, 50 LPM, 1 CFM (28.3 LPM)
  • Large IR touch screen
  • Optional WiFi
  • Provides ISO and EU GMP Annex 1 reports
  • Meets ISO 21501-4

Aerosol

Lasair® III 110
Sensitivity range: 0.1 – 5.0 μm

The Lasair® III 110 Airborne Particle Counter is a laser diode-based counter. It provides real-time measurement of yield-impacting particles with three configurations to meet your unique application needs.

  • Flow rate: 1.0 CFM (28.3 LPM)
  • 8 user adjustable channels

Lasair® III 310B, 310C, 350L, 5100
Sensitivity range: 0.3 – 25.0 μm

  • Flow rates: 100 LPM, 50 LPM, 1 CFM (28.3 LPM)
  • Large IR touch screen
  • Optional WiFi
  • Provides ISO and EU GMP Annex 1 reports
  • Meets ISO 21501-4

Airnet® II Particle Sensor (4 Channel) Models 201, 301, 310, 501, 510
Sensitivity range: 0.2 - 10.0 µm

The Airnet® II 4 Channel Air Particle Sensor measures the size and number of particles suspended in the air for real-time monitoring of defect-causing particles.

IsoAir® 310P Air Particle Sensor
Sensitivity range: 0.5 - 5.0 µm

The IsoAir 310P Aerosol Particle Sensor makes aerosol monitoring easy and cost- effective. It has unparalleled performance in a rugged, chemical-resistant, and easy- to-disinfect 316L stainless steel box. The clean, reliable internal pump lowers installation costs and the need for costly vacuum system connections.

Airborne Molecular Contamination

Continuous Monitoring of Critical Areas

Air Sentry II

  • High-sensitivity detection of acids and bases (acids, amines, ammonia and chlorides)
  • Versatile product configuration for point-of-use, multi-point and mobile airborne molecular contamination monitoring applications
  • Compact size allows placement in any location
  • Ethernet, RS-232, 4-20 mA outputs

Troubleshooting

AirSentry® || Mobile
Mobile Airborne Molecular Contamination Detection System

  • Troubleshooting and spatial identification of airborne molecular contamination sources
  • Isolation and verification of AMC events detected by multi-point monitoring systems
  • Testing of AMC levels within minienvironments and process tools
  •  Testing and validation of chemical filtration performance

Facility AMC Monitoring

AMC Cleanroom Monitor AirSentry ||
Multi-point System ®

  • Multi-point cleanroom and process bay monitoring for airborne molecular contamination 
  • Baseline and qualification of AMC levels in new cleanrooms
  • Analysis and quantification of chemical filter efficiency
  • Characterization of AMC contribution from makeup and recirculation air
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