Syringe Liquid Particle Sampler

Syringe Liquid Particle Sampler

Models: 1040, 1100, 1200, 1300, 1500, 2000

The SLS Syringe Sampling System uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle sampling is required, where the sampler device cannot contribute contamination to the chemical sample.

The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software. The following SLS product systems are available:

Particle Sampler Name SLS-1040 SLS-1100 SLS-1200 SLS-1300 SLS-1500 SLS-2000
Paricle Counter UltraChem 40 UltraChem 100 LiQuilaz S02 LiQuilaz S03 LiQuilaz S05 LiQuilaz E15 or E20P
Minimum Particle Size 40 nm 100 nm 0.2 μ 0.3 μ 0.5 μ 1.5 μ
Particle Size Range 40 to 125 nm 100 to 500 nm 02 to 2.0 μm 0.3 to 3.0 μm 0.5 to 20 μm 1.5 to 125 μm (E15) 2.0 to 125 μm (E20P)
# Size Channels 4 4 15 15 15 15
Sample Flow Rate 5 ml/min 20 ml/min 20 ml/min 20 ml/min 20 ml/min 20 ml/min
Sample Flow Rate 5 ml/min 20 ml/min 20 ml/min 20 ml/min 20 ml/min 20 ml/min

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Product Description


  • Proven PMS UltraChem or LiQuilaz particle sensors
  • Menu-driven data collection – 1, 5, 10 and 25 ml
  • Wetted materials compatible with corrosive chemicals
  • Compact design with on-board particle sensor


  • Precise particle measurement
  • Versatile – select various particle sensors and syringe sizes
  • Cost-effective
  • Easy-to-use
  • Small sample volume – eliminates sample waste


  • Diverse applications in semiconductor and process chemical manufacturing
  • Incoming quality measurement of process chemicals
  • Point-of-process monitoring on process tools
  • Testing and qualification of chemical components
  • Outgoing chemical qualification testing
  • Mechanical parts cleanliness testing

Download PDF SpecSheet

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