Specification Sheet Lasair II-110 Particle Counter

Chem 20™ Chemical Particle Counter

Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the new PMS Chem 20 Chemical Particle Counter is the world’s most sensitive particle sensor for high purity process chemicals.

Extensive data on chemical distribution and packaging systems proves that the PMS Chem 20 sensor, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.

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Product Description

BENEFITS

  • Detect 20 nm PSL & 9 nm Au particles in real time
  • Detect yield-limiting particles (not possible with competitive technologies)
  • React quickly to particle excursions long before surface scan or yield data are available
  • Optimize chemical delivery systems from the loading dock to point-of-process
  • Tighten process control limits through improved sample population statistics

FEATURES

  • Advanced laser optics and detectors enable detection of 20 nm polymer and 9 nm metallic particles in chemicals
  • On-board chemical flow meter to set sample flow
  • First particle counter optimized for low and high refractive index chemicals for improved performance:
  • Chem 20 sensor, for chemicals with lower indices of refraction
  • Chem 20-HI sensor, tailored for sulfuric acid and other higher-index chemicals
  • On-board leak detection to provide alarm upon an internal chemical leak
  • Low-flow detector and alarm to ensure consistent data
  • Bubble detector to optimize data and protect sensor
  • Two view modes optimize instrument operation for very dirty or very clean applications, extending product application space
  • Local data display
  • Flexible communications systems support legacy data acquisition systems

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