AirSentry_II

AirSentry® II

Particle Measuring Systems’ newest Airborne Molecular Contamination (AMC) monitor, the AirSentry II, was designed with performance in mind. A new Ion Mobility Spectrometry (IMS) cell provides part-per-trillion (ppt) sensitivity, fast response, and increased selectivity. Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis. By maximizing the value of contamination information delivered, including high-sensitivity uninterrupted data, the AirSentry II allows smarter decisions to be made for locating, controlling, and preventing molecular contamination.

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Product Description

BENEFITS

  • Continuous AMC monitoring of a critical location
  • Robust and reliable data acquisition, control, and analysis
  • No moving parts
  • Infrequent preventive maintenance
  • Ethernet, RS-232, 4-20 mA outputs
  • Compact size allows placement in any location
  • Single external calibration system ensures analyzer to analyzer matching

APPLICATIONS

  • Exposure optics
    • Hazing and lens warranty data
  • Reticle stage
    • Reticle hazing
  • Resist track
    • Dispense/develop contamination (t-topping)
  • Reticle inspection tool and stockers
    • Storage contamination
  • Ambient cleanroom monitoring
    • Baseline contamination
  • Make-up and recirculated air analysis
    • Contamination movement

Download PDF SpecSheet

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