Product Description
BENEFITS
- Monitors up to 30 sample locations
- Low cost per sample point
- Multiple AMC compounds detected (NH3, Amines, Acids, Chlorides, SO2)
- Real-time graphical software
- Alarm monitoring to AMC events or trends
- Calibrations traceable to the National Institute of Standards and Technology (NIST)
- Compact size
- Simplifies track/trace and control aspects of molecular contamination monitoring
APPLICATIONS
- Multi-point cleanroom and process bay monitoring
- Determining and monitoring the chemical filter efficiency and effectiveness for multiple lithography tools (upstream/ downstream of filters for each tool)
- AMC contribution from makeup and recirculation air handlers
- Long-term contamination trending
- Baseline and qualification of AMC levels in new cleanrooms